ASTM E2245-05

Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer

NORM herausgegeben am 1.11.2005

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The information about the standard:

Designation standards: ASTM E2245-05
Note: UNGÜLTIG
Publication date standards: 1.11.2005
The number of pages: 20
Approximate weight : 60 g (0.13 lbs)
Country: American technical standard
Kategorie: Technische Normen ASTM

Annotation of standard text ASTM E2245-05 :

Keywords:
cantilevers, combined standard uncertainty, fixed-fixed beams, interferometry, length measurements, microelectromechanical systems, MEMS, polysilicon, residual strain, stiction, strain gradient, test structure, ICS Number Code 37.040.20 (Photographic paper, film and plates. Cartridges)