ASTM F1152-93

Standard Test Method for Dimensions of Notches on Silicon Wafers

NORM herausgegeben am 10.1.2002

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The information about the standard:

Designation standards: ASTM F1152-93
Note: UNGÜLTIG
Publication date standards: 10.1.2002
The number of pages: 3
Approximate weight : 9 g (0.02 lbs)
Country: American technical standard
Kategorie: Technische Normen ASTM

Annotation of standard text ASTM F1152-93 :

Keywords:
notch, notch dimension, optical comparator, silicon, wafer