
Standard Test Method for Characterization of Metal-Oxide-Silicon (MOS) Structures by Capacitance-Voltage Measurements
NORM herausgegeben am 1.1.1992
Bezeichnung normen: ASTM F1153-92(1997)
Anmerkung: UNGÜLTIG
Ausgabedatum normen: 1.1.1992
Zahl der Seiten: 7
Gewicht ca.: 21 g (0.05 Pfund)
Land: Amerikanische technische Norm
Kategorie: Technische Normen ASTM
Keywords:
Average carrier concentration, Calibration-semiconductor instrumentation, Capacitance, Contamination-semiconductors, Defects-semiconductors, Dielectric constant (permittivity)/dissipation factor, Doping concentration, Electrical conductors-semiconductors, Electromagnetic interference, Equilibrium capacitance, Fixed oxide charge, Flatband capacitance/voltage, Interfacial tension, Inversion, Meal-oxide-silicon (MOS) structures, Minimum depletion layer capacitance