ASTM F1261M-96(2003)

Standard Test Method for Determining the Average Electrical Width of a Straight, Thin-Film Metal Line [Metric] (Withdrawn 2009)

NORM herausgegeben am 10.6.1996

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The information about the standard:

Designation standards: ASTM F1261M-96(2003)
Note: UNGÜLTIG
Publication date standards: 10.6.1996
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Kategorie: Technische Normen ASTM

Annotation of standard text ASTM F1261M-96(2003) :

Keywords:
aluminum, electrical interconnect, electrical linewidth, linewidth, metallization, semiconductor, test structure, thin film