Standard Test Method for Measuring Oxygen Concentration in Heavily Doped Silicon Substrates by Secondary Ion Mass Spectrometry (Includes all amendments And changes 3/2/2021).
NORM herausgegeben am 1.1.1992
Designation standards: ASTM F1366-92(1997)e1
Note: UNGÜLTIG
Publication date standards: 1.1.1992
The number of pages: 5
Approximate weight : 15 g (0.03 lbs)
Country: American technical standard
Kategorie: Technische Normen ASTM
Keywords:
FTIR, oxygen, secondary ion mass spectometry, silicon