Standard Test Method for Determination of Total Hydrocarbon Contribution by Gas Distribution System Components

The information about the standard:

Designation standards: ASTM F1398-93(1999)
Note: UNGÜLTIG
Publication date standards: 10.6.1999
The number of pages: 10
Approximate weight : 30 g (0.07 lbs)
Country: American technical standard
Kategorie: Technische Normen ASTM

Annotation of standard text ASTM F1398-93(1999) :

Keywords:
Argon, Condensable hydrocarbons, Contamination, Flame ionization detectors (FID), Flow and flow rate-semiconductor applications, Gas distribution systems, Hydrocarbons, Instrumental measurement, Mass flow controller (MFC), Methane (CH[inf]4[reset]) equivalent, Minimum detection limit (MDL), Nitrogen, Noncondensable hydrocarbons, Semiconductor clean rooms, Spectrometry-mass, Spool piece, Stainless steel-gas distribution systems, Total hydrocarbons (THC)