ASTM F1451-92(1999)

Standard Test Method for Measuring Sori on Silicon Wafers by Automated Noncontact Scanning (Withdrawn 2003)

NORM herausgegeben am 1.1.1999

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The information about the standard:

Designation standards: ASTM F1451-92(1999)
Note: UNGÜLTIG
Publication date standards: 1.1.1999
The number of pages: 12
Approximate weight : 36 g (0.08 lbs)
Country: American technical standard
Kategorie: Technische Normen ASTM

Annotation of standard text ASTM F1451-92(1999) :

Keywords:
noncontact measurement, semiconductor, shape, silicon, sori, wafers, ICS Number Code 29.045 (Semiconducting materials)