Standard Guide for Application of Silicon Standard Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon
NORM herausgegeben am 10.6.2000
Bezeichnung normen: ASTM F1527-00
Anmerkung: UNGÜLTIG
Ausgabedatum normen: 10.6.2000
Zahl der Seiten: 15
Gewicht ca.: 45 g (0.10 Pfund)
Land: Amerikanische technische Norm
Kategorie: Technische Normen ASTM
Keywords:
Calibration-semiconductor analysis instrumentation, Control chart, Eddy current gage, Four-point probe method, Mercury probe, Probe methods-four-point probe, Probe methods-spreading resistance probe, Reference materials (RM), Resistance (electrical)-semiconductors, Resistivity reference wafer, Sheet resistance, Silicon semiconductors, Silicon semiconductors-slices/wafers, SPC, Spreading resistance probe, Standard reference materials (SRM)