Standard Guide for Application of Certified Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon (Withdrawn 2003)
NORM herausgegeben am 10.7.2002
Bezeichnung normen: ASTM F1527-02
Anmerkung: UNGÜLTIG
Ausgabedatum normen: 10.7.2002
Zahl der Seiten: 15
Gewicht ca.: 45 g (0.10 Pfund)
Land: Amerikanische technische Norm
Kategorie: Technische Normen ASTM
Keywords:
certified reference materials, control chart, eddy current gage, four-point probe method, mercury probe, reference materials, resistivity, resistivity reference wafer, semiconductor, sheet resistance, silicon wafers, SPC, spreading resistance probe, Standard Reference Materials, ICS Number Code 29.045 (Semiconducting materials)