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ASTM F1527-02

Standard Guide for Application of Certified Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon (Withdrawn 2003)

NORM herausgegeben am 10.7.2002

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The information about the standard:

Designation standards: ASTM F1527-02
Note: UNGÜLTIG
Publication date standards: 10.7.2002
The number of pages: 15
Approximate weight : 45 g (0.10 lbs)
Country: American technical standard
Kategorie: Technische Normen ASTM

Annotation of standard text ASTM F1527-02 :

Keywords:
certified reference materials, control chart, eddy current gage, four-point probe method, mercury probe, reference materials, resistivity, resistivity reference wafer, semiconductor, sheet resistance, silicon wafers, SPC, spreading resistance probe, Standard Reference Materials, ICS Number Code 29.045 (Semiconducting materials)