Standard Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces (Withdrawn 2003)
NORM herausgegeben am 10.1.2001
Designation standards: ASTM F154-02
Note: UNGÜLTIG
Publication date standards: 10.1.2001
The number of pages: 13
Approximate weight : 39 g (0.09 lbs)
Country: American technical standard
Kategorie: Technische Normen ASTM
Keywords:
contaminant, defects, dislocation, epitaxial, fracture, preferential etch, scratch, shallow pit, silicon, slip, stacking fault, ICS Number Code 17.040.20 (Properties of surfaces)