ASTM F1618-96

Standard Practice for Determination of Uniformity of Thin Films on Silicon Wafers

NORM herausgegeben am 1.1.1996

Englisch -
Sicheres Online-PDF (74.30 EUR)

The information about the standard:

Designation standards: ASTM F1618-96
Note: UNGÜLTIG
Publication date standards: 1.1.1996
The number of pages: 7
Approximate weight : 21 g (0.05 lbs)
Country: American technical standard
Kategorie: Technische Normen ASTM

Annotation of standard text ASTM F1618-96 :

Keywords:
dielectric layers, epitaxial layers, ion implant, metal films, sampling plans, semiconductor, silicon, thin films, uniformity, ICS Number Code 29.045 (Semiconducting materials)