Standard Test Method for Evaluating Gate Oxide Integrity by Voltage Ramp Technique (Withdrawn 2003)
NORM herausgegeben am 10.2.1997
Designation standards: ASTM F1771-97(2002)
Note: UNGÜLTIG
Publication date standards: 10.2.1997
The number of pages: 8
Approximate weight : 24 g (0.05 lbs)
Country: American technical standard
Kategorie: Technische Normen ASTM
Keywords:
current density, defect density, electric field strength, extrinsic breakdown, intrinsic breakdown, oxide breakdown, ICS Number Code 29.045 (Semiconducting materials)