ASTM F1810-97(2002)

Standard Test Method for Counting Preferentially Etched or Decorated Surface Defects in Silicon Wafers (Withdrawn 2003)

NORM herausgegeben am 10.6.1997

Englisch -
PDF - sofortiges Download (62.20 EUR)

The information about the standard:

Designation standards: ASTM F1810-97(2002)
Note: UNGÜLTIG
Publication date standards: 10.6.1997
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Kategorie: Technische Normen ASTM

Annotation of standard text ASTM F1810-97(2002) :

Keywords:
defect density, dislocation, grain boundary, microscopic, polycrystalline imperfection, preferential etch, silicon, slip, ICS Number Code 29.045 (Semiconducting materials)