Standard Test Methods for Analyzing Organic Contaminants on Silicon Wafer Surfaces by Thermal Desorption Gas Chromatography (Withdrawn 2003) (Includes all amendments And changes 8/16/2017).
NORM herausgegeben am 7.10.1999
Designation standards: ASTM F1982-99e1
Note: UNGÜLTIG
Publication date standards: 7.10.1999
The number of pages: 7
Approximate weight : 21 g (0.05 lbs)
Country: American technical standard
Kategorie: Technische Normen ASTM
Keywords:
atomic emission detector (AED), flame ionization detector (FID), flame photometric detector(FPD), gas chromatography, mass spectrometer (MS), nitrogen/phosphorus thermionic detector(NPD), organic contamination, organophosphorus compounds, phosphorus selective detector, silicon wafer surfaces thermal desorption, ICS Number Code 29.045 (Semiconducting materials)