Standard Test Method for Sheet Resistance of Silicon Epitaxial, Diffused, Polysilicon, and Ion-implanted Layers Using an In-Line Four-Point Probe with the Single-Configuration Procedure (Includes all amendments And changes 8/16/2017).
NORM herausgegeben am 10.12.2000
Bezeichnung normen: ASTM F374-00a
Anmerkung: UNGÜLTIG
Ausgabedatum normen: 10.12.2000
Zahl der Seiten: 17
Gewicht ca.: 51 g (0.11 Pfund)
Land: Amerikanische technische Norm
Kategorie: Technische Normen ASTM
Keywords:
collinear four-probe array, diffused layer, epitaxial layer, four-point probe method, implanted layer, Ion-implanted layer, probe methods-four-point probe, resistance (electrical)-semiconductors, sheet resistance, silicon semiconductors, sheet resistance-Si-epitaxial/diffused/ion-implanted layers, using, in-line four-point probe, ICS Number Code 29.045 (Semiconducting materials)