Standard Test Methods for Measuring Resistivity of Semiconductor Slices or Sheet Resistance of Semiconductor Films with a Noncontact Eddy-Current Gage (Withdrawn 2003)
NORM herausgegeben am 10.12.2002
Designation standards: ASTM F673-02
Note: UNGÜLTIG
Publication date standards: 10.12.2002
The number of pages: 6
Approximate weight : 18 g (0.04 lbs)
Country: American technical standard
Kategorie: Technische Normen ASTM
Keywords:
contactless measurements, eddy current, nondestructive evaluation, resistivity, semiconductor, sheet, resistance, silicon, thin films, wafer, ICS Number Code 29.045 (Semiconducting materials)