
Standard Test Methods for Measuring Crystallographic Orientation of Flats on Single Crystal Silicon Wafers by X-Ray Techniques (Withdrawn 2003)
NORM herausgegeben am 10.12.2002
Designation standards: ASTM F847-02
Note: UNGÜLTIG
Publication date standards: 10.12.2002
The number of pages: 8
Approximate weight : 24 g (0.05 lbs)
Country: American technical standard
Kategorie: Technische Normen ASTM
Keywords:
crystallographic orientation, flats, Laue defraction, silicon, single crystal, ICS Number Code 29.045 (Semiconducting materials)