ASTM F907-85(1992)

Test Method for Measurement of Rotational Acceleration of a Wafer for Photoresist Spin Coating (Withdrawn 1997)

Englisch -
Elektronische PDF (AUF ANFRAGE)

The information about the standard:

Designation standards: ASTM F907-85(1992)
Note: UNGÜLTIG
Approximate weight : 300 g (0.66 lbs)
Country: American technical standard
Kategorie: Technische Normen ASTM