ASTM F928-93(1999)

Standard Test Methods for Edge Contour of Circular Semiconductor Wafers and Rigid Disk Substrates

NORM herausgegeben am 10.1.2002

Englisch -
Sicheres Online-PDF (63.50 EUR)

The information about the standard:

Designation standards: ASTM F928-93(1999)
Note: UNGÜLTIG
Publication date standards: 10.1.2002
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Kategorie: Technische Normen ASTM

Annotation of standard text ASTM F928-93(1999) :

Keywords:
contour, edge contour, gallium arsenide, optical comparator, projection microscope, rigid disk, semiconductor, silicon, wafer, ICS Number Code 29.045 (Semiconducting materials)