Standard Test Method for In-Plane Length Measurements of Thin, Reflecting Films Using an Optical Interferometer (Includes all amendments And changes 5/28/2018).
NORM herausgegeben am 1.11.2011
Designation standards: ASTM E2244-11e1
Note: UNGÜLTIG
Publication date standards: 1.11.2011
The number of pages: 14
Approximate weight : 42 g (0.09 lbs)
Country: American technical standard
Kategorie: Technische Normen ASTM
Keywords:
cantilevers, combined standard uncertainty, deflection measurements, fixed-fixed beams, interferometry, length measurements, microelectromechanical systems, MEMS, polysilicon, residual strain, round robin, strain gradient, test structure, ICS Number Code 37.040.20 (Photographic paper, film and plates. Cartridges)