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ASTM F1621-96

Standard Practice for Determining the Positional Accuracy Capabilities of a Scanning Surface Inspection System (Withdrawn 2003)

NORM herausgegeben am 1.1.1996

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The information about the standard:

Designation standards: ASTM F1621-96
Note: UNGÜLTIG
Publication date standards: 1.1.1996
The number of pages: 8
Approximate weight : 24 g (0.05 lbs)
Country: American technical standard
Kategorie: Technische Normen ASTM

Annotation of standard text ASTM F1621-96 :

Keywords:
Localized light scattering, Particle analysis, Particle counting, Positional accuracy, Scanning surface inspection system (SSIS), SSIS (scanning surface inspection system), positional accuracy capabilities-scanning surface inspection system, (SSIS), practice,, Silicon semiconductors-slices/wafers, positional accuracy capabilities,emscanning surface inspection system, (SSIS), practice,,Order Form, ICS Number Code 29.045 (Semiconducting materials)