
Semiconductor devices. Micro-electromechanical devices. Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems.
NORM herausgegeben am 31.10.2013
Designation standards: BS EN 62047-11:2013
Publication date standards: 31.10.2013
The number of pages: 24
Approximate weight : 72 g (0.16 lbs)
Country: British technical standard
Kategorie: Technische Normen BS
ISBN: 978 0 580 69448 6 Status: Definitive