BS EN 62047-12:2011

Semiconductor devices. Micro-electromechanical devices. Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures.

NORM herausgegeben am 30.11.2011

The information about the standard:

Designation standards: BS EN 62047-12:2011
Publication date standards: 30.11.2011
The number of pages: 34
Approximate weight : 102 g (0.22 lbs)
Country: British technical standard
Kategorie: Technische Normen BS