BS EN 62047-16:2015

Semiconductor devices. Micro-electromechanical devices. Test methods for determining residual stresses of MEMS films. Wafer curvature and cantilever beam deflection methods.

NORM herausgegeben am 31.7.2015

The information about the standard:

Designation standards: BS EN 62047-16:2015
Publication date standards: 31.7.2015
The number of pages: 18
Approximate weight : 54 g (0.12 lbs)
Country: British technical standard
Kategorie: Technische Normen BS