
Semiconductor devices. Micro-electromechanical devices. Description and measurement methods for micro trench and needle structures.
NORM herausgegeben am 31.5.2016
Designation standards: BS EN 62047-26:2016
Publication date standards: 31.5.2016
The number of pages: 34
Approximate weight : 102 g (0.22 lbs)
Country: British technical standard
Kategorie: Technische Normen BS
ISBN: 978 0 580 85309 8 Status: Under Review