BS EN 62047-9:2011

Semiconductor devices. Micro-electromechanical devices. Wafer to wafer bonding strength measurement for MEMS.

NORM herausgegeben am 31.1.2013

Englisch -
PDF - sofortiges Download (269.20 EUR)

The information about the standard:

Designation standards: BS EN 62047-9:2011
Publication date standards: 31.1.2013
The number of pages: 30
Approximate weight : 90 g (0.20 lbs)
Country: British technical standard
Kategorie: Technische Normen BS

Annotation of standard text BS EN 62047-9:2011 :

ISBN: 978 0 580 78793 5 Status: Definitive