
Semiconductor devices. Micro-electromechanical devices. Environmental test methods of MEMS piezoelectric thin films for sensor application.
NORM herausgegeben am 5.4.2023
Designation standards: BS IEC 62047-37:2020
Publication date standards: 5.4.2023
The number of pages: 20
Approximate weight : 60 g (0.13 lbs)
Country: British technical standard
Kategorie: Technische Normen BS
ISBN: 978 0 539 02533 0 Status: Definitive