Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy.
NORM herausgegeben am 15.5.2001
Designation standards: BS ISO 14706:2000
Note: UNGÜLTIG
Publication date standards: 15.5.2001
The number of pages: 32
Approximate weight : 96 g (0.21 lbs)
Country: British technical standard
Kategorie: Technische Normen BS