
Measurement of the conductivity for metal thin films at microwave and millimeter-wave frequencies - Balanced-type circular disk resonator method
NORM herausgegeben am 1.6.2026
Bezeichnung normen: ČSN EN IEC 63616
Zeichen: 353013
Katalog-Nummer: 523546
Ausgabedatum normen: 1.6.2026
Zahl der Seiten: 20
Gewicht ca.: 60 g (0.13 Pfund)
Land: Tschechische technische Norm
Kategorie: Technische Normen ČSN
This document relates to a conductivity measurement method of thin metal films at microwave and millimeter-wave frequencies. This method has been developed to evaluate the conductivity of a metal foil used for adhering to a substrate or the interfacial conductivity of a metal layer formed on a dielectric substrate. It uses higher-order modes of a balanced-type circular disk resonator and provides broadband conductivity measurements by using a single resonator.
In comparison with the conventional method described in IEC 61788 7 [1] , this method has the following characteristics:
- the value of the conductivity of a metal foil can be measured accurately and non destructively;
- the value of the interfacial conductivity of a metal layer on a dielectric substrate can be measured accurately and non-destructively;
- this method presents broadband measurements by using higher-order modes by one resonator;
- this method is applicable for the measurements under the following conditions:
- frequency: 10 GHz 170 GHz;
- conductivity: 105 S/m 108 S/m