
Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical concentration
NORM herausgegeben am 1.8.2026
Designation standards: ČSN EN ISO 14644-13
Classification mark: 125301
Catalog number: 523936
Publication date standards: 1.8.2026
The number of pages: 48
Approximate weight : 144 g (0.32 lbs)
Country: Czech technical standard
Kategorie: Technische Normen ČSN
This document gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are all surfaces (external or internal) that are of interest. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) levels and which techniques should be considered to achieve these specified levels.
The appropriateness of cleaning techniques will make reference to the cleanliness levels and associated test methods found in ISO 14644-9 and ISO 14644-10