Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration
NORM herausgegeben am 1.8.2026
Designation standards: ČSN EN ISO 14644-14
Classification mark: 125301
Catalog number: 523937
Publication date standards: 1.8.2026
The number of pages: 36
Approximate weight : 108 g (0.24 lbs)
Country: Czech technical standard
Kategorie: Technische Normen ČSN
This document specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1. Particle sizes range from 0,1 µm to equal to or larger than 5 µm (given in ISO 14644-1)