Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry
NORM herausgegeben am 1.4.2023
Bezeichnung normen: ČSN EN ISO 23216
Zeichen: 039051
Katalog-Nummer: 516601
Ausgabedatum normen: 1.4.2023
Zahl der Seiten: 20
Gewicht ca.: 60 g (0.13 Pfund)
Land: Tschechische technische Norm
Kategorie: Technische Normen ČSN
This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.
It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.
It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes