Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments
NORM herausgegeben am 1.8.2025
Designation standards: ČSN EN ISO 25178-604
Classification mark: 014451
Catalog number: 521668
Publication date standards: 1.8.2025
The number of pages: 36
Approximate weight : 108 g (0.24 lbs)
Country: Czech technical standard
Kategorie: Technische Normen ČSN
This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements