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ČSN EN ISO 14644-10 (125301)

Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination

NORM herausgegeben am 1.11.2022

Englisch -
Gedruckt (17.60 EUR)

Informationen über die Norm:

Bezeichnung normen: ČSN EN ISO 14644-10
Zeichen: 125301
Katalog-Nummer: 515524
Ausgabedatum normen: 1.11.2022
Zahl der Seiten: 44
Gewicht ca.: 132 g (0.29 Pfund)
Land: Tschechische technische Norm
Kategorie: Technische Normen ČSN

Die Annotation des Normtextes ČSN EN ISO 14644-10 (125301):

This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices. NOTE 1 - For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface. NOTE 2 - This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance