Ellipsometry - Principles
NORM herausgegeben am 1.4.2023
Bezeichnung normen: ČSN EN ISO 23131
Zeichen: 039050
Katalog-Nummer: 516600
Ausgabedatum normen: 1.4.2023
Zahl der Seiten: 28
Gewicht ca.: 84 g (0.19 Pfund)
Land: Tschechische technische Norm
Kategorie: Technische Normen ČSN
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories. It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3