GB/T 32814-2016

Silicon-based MEMS fabrication technology—Specification for criterion of the SOI wafer based MEMS process

NORM herausgegeben am 29.8.2016

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The information about the standard:

Designation standards: GB/T 32814-2016
Publication date standards: 29.8.2016
Country: Chinese technical standard
Kategorie: Technische Normen GB