
Surface chemical analysis—Depth profiling—Non-destructive depth profiling of nanoscale heavy metal oxide thin films on Si substrates with medium energy ion scattering
NORM herausgegeben am 28.1.2026
Designation standards: GB/T 47073-2026
Note: Execute Date: august 2026
Publication date standards: 28.1.2026
Country: Chinese technical standard
Kategorie: Technische Normen GB