
Micro-electromechanical systems (MEMS) technology—Requirements for reliability evaluation of three-dimensional structure of through-silicon vias
NORM herausgegeben am 25.5.2026
Designation standards: GB/T 47725-2026
Note: Execute Date: december 2026
Publication date standards: 25.5.2026
Country: Chinese technical standard
Kategorie: Technische Normen GB