
State system for ensuring the uniformity of measurements. Single-crystal silicon nanometer range relief measures. Requirements for geometrical shapes, linear sizes and manufacturing material selection
NORM herausgegeben am 1.2.2008
Designation standards: GOST R 8.628-2007
Publication date standards: 1.2.2008
The number of pages: 11
Approximate weight : 33 g (0.07 lbs)
Country: Russian technical standard
Kategorie: Technische Normen GOST
Implemented changes and corrections:
Amd. 2.11