State system for ensuring the uniformity of measurements Instruments measuring the characteristics of ultraviolet radiation of technological testing of nanophotolitography.Verification procedure
NORM herausgegeben am 1.1.2011
Designation standards: GOST R 8.659-2009
Publication date standards: 1.1.2011
The number of pages: 16
Approximate weight : 48 g (0.11 lbs)
Country: Russian technical standard
Kategorie: Technische Normen GOST