Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
NORM herausgegeben am 5.4.2019
Bezeichnung normen: IEC 62047-34-ed.1.0
Ausgabedatum normen: 5.4.2019
Zahl der Seiten: 16
Gewicht ca.: 48 g (0.11 Pfund)
Land: Internationale technische Norm
Kategorie: Technische Normen IEC
IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.