Semiconductor devices - Micro-electromechanical devices - Part 44: Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices

Informationen über die Norm:

Bezeichnung normen: IEC 62047-44-ed.1.0
Ausgabedatum normen: 22.2.2024
Zahl der Seiten: 19
Gewicht ca.: 57 g (0.13 Pfund)
Land: Internationale technische Norm
Kategorie: Technische Normen IEC

Die Annotation des Normtextes IEC 62047-44-ed.1.0 :

IEC 62047-44:2024 describes terminology, definitions and test methods that are used to evaluate and determine the dynamic performance of MEMS (Micro-Electromechanical Systems) resonant electric-field-sensitive devices. It also specifies sample requirements and test equipment for dynamic performances of MEMS resonant electric-field-sensitive devices. The statements made in this document are also applicable to MEMS resonant electric-field-sensitive devices with various driving mechanisms such as electrostatic, electrothermal, electromagnetic, piezoelectric, etc.