Corrigendum 1 - Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS
NORM herausgegeben am 8.3.2012
Designation standards: IEC 62047-9-ed.1.0/Cor.1
Note: Korrektur
Publication date standards: 8.3.2012
Approximate weight : 300 g (0.66 lbs)
Country: International technical standard
Kategorie: Technische Normen IEC