Nanomanufacturing - Key control characteristics - Part 9-1: Traceable spatially resolved nano-scale stray magnetic field measurements - Magnetic force microscopy
NORM herausgegeben am 14.10.2021
Bezeichnung normen: IEC/TS 62607-9-1-ed.1.0
Ausgabedatum normen: 14.10.2021
Zahl der Seiten: 63
Gewicht ca.: 189 g (0.42 Pfund)
Land: Internationale technische Norm
Kategorie: Technische Normen IEC
IEC TS 62607-9-1:2021(E) establishes a standardized method to characterize spatially varying magnetic fields with a spatial resolution down to 10 nm for flat magnetic specimens by magnetic force microscopy (MFM). MFM primarily detects the stray field component perpendicular to the sample surface. The resolution is achieved by the calibration of the MFM tip using magnetically nanostructured reference materials.