Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films
NORM herausgegeben am 1.12.2015
Designation standards: STN EN 62047-17
Classification mark: 358792
Catalog number: 121889
Publication date standards: 1.12.2015
Approximate weight : 51 g (0.11 lbs)
Country: Slovak technical standard
Kategorie: Technische Normen STN