Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures
NORM herausgegeben am 1.10.2016
Designation standards: STN EN 62047-26
Classification mark: 358792
Catalog number: 123439
Publication date standards: 1.10.2016
Approximate weight : 36 g (0.08 lbs)
Country: Slovak technical standard
Kategorie: Technische Normen STN