Semiconductor devices - Micro-electromechanical devices Part 3: Thin film standard test piece for tensile testing
NORM herausgegeben am 1.6.2007
Designation standards: STN EN 62047-3
Classification mark: 358792
Catalog number: 103753
Publication date standards: 1.6.2007
The number of pages: 15
Approximate weight : 45 g (0.10 lbs)
Country: Slovak technical standard
Kategorie: Technische Normen STN