Surface chemical analysis — General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry
NORM herausgegeben am 19.6.2025
Designation standards: ISO 11505:2025-ed.2.0
Publication date standards: 19.6.2025
The number of pages: 34
Approximate weight : 102 g (0.22 lbs)
Country: International technical standard
Kategorie: Technische Normen ISO
Description / Abstract: This document specifies a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films. The applicability of this document is limited to description of general procedures for quantification of the chemical composition and thickness in GD-OES compositional depth profiling. This document is not directly applicable for quantification of individual materials having various thicknesses and elements to be determined.