Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
NORM herausgegeben am 18.7.2016
Bezeichnung normen: ISO 16700:2016-ed.2.0
Ausgabedatum normen: 18.7.2016
Zahl der Seiten: 18
Gewicht ca.: 54 g (0.12 Pfund)
Land: Internationale technische Norm
Kategorie: Technische Normen ISO
Description / Abstract: ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.