Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials
NORM herausgegeben am 28.2.2024
Bezeichnung normen: ISO 18118:2024-ed.3.0
Ausgabedatum normen: 28.2.2024
Zahl der Seiten: 22
Gewicht ca.: 66 g (0.15 Pfund)
Land: Internationale technische Norm
Kategorie: Technische Normen ISO
Description / Abstract: This document gives guidance on the measurement and use of experimentally-determined relative sensitivity factors for the quantitative analysis of homogeneous materials by Auger electron spectroscopy and X-ray photoelectron spectroscopy. The methods described only apply to polycrystalline and amorphous materials, as effects inherent to single-crystal samples are not addressed.